Applied Materials has come up with a new etch technology capable of a precision of two atomic layers. The system, called Selectra, is already installed in 10nm process flows at five customers – three of them logic manufacturers and two of them memory manufacturers. It is being used for 3D NAND production. “Selectra has been ...
Applied etches to two atomic layers precision
from ElectronicsWeekly http://www.electronicsweekly.com/news/applied-etches-to-two-atomic-layers-precision-2016-06/
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