Imec has opened a 4,000 square-metre 300mm clean rom which brings its total clean room capacity to 12,000 square metres. It will give Imec the capability to scale ICs beyond 7nm. Installations of the first tools began in January 2016. The new 300mm cleanroom complements Imec’s other production facilities including its bio-nanolabs, neuroelectronics labs, imaging ...
Imec cleanroom pushes towards ‘the ultimate IC technology.’
from ElectronicsWeekly http://www.electronicsweekly.com/news/business/imec-opens-new-cleanroom-2016-03/
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