18 out of the 30 EUV machines which ASML will ship this year will go to TSMC, reports Digitimes. At the end of March, TSMC is expected to begin volume production of a version of its 7nm process which uses EUV. It first started volume production on 7nm using immersion lithography in April 2018. This ...
This story continues at TSMC to start 7nm on EUV next month
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from Electronics Weekly https://www.electronicsweekly.com/news/business/tsmc-start-7nm-euv-next-month-2019-02/
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