Intel’s EUV manager told this week’s SPIE Advanced Lithography Conference that EUV may not be ready for 7nm. Dr. Britt Turkoff pointed to a number of potential show-stoppers. The old bug-bear of light-source power is still with us with 250W needed and not much more than 150W attainable. Photoresist and pellicles are also in need ...
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from Electronics Weekly http://www.electronicsweekly.com/news/business/euv-may-not-ready-7nm-2017-03/
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